The GCA 6300 DSW steppers have chucks for 3", 100 mm, and 150 mm wafers. Pieces smaller than this can also be used but there is no special chuck for this purpose. 

6300 DWS

ALS Waferstep 200

XLS 7800

6200

7200

7500/29

8000/45

8000/46

6300/37

AutoStep 200

7300

ALS-1710

4800 DSW

7500/21

8000/48

6100/37

8000/1635

7250

8000/2035

ALS-200

8500R DSW

ALS-1715

ALS-1713

The Model 8000 DSW system offers the newest in reduction lens technology from the oldest, most experienced and most respected lens manufacturers in the world. Resolution of 1.0 um or better is easily attained under production conditions, with three-sigma registration of +-0.20 um. 

8000 DSW

6700/37

GCA

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ALS Waferstep 200

6200

6300 DWS

XLS 7800

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