Description
i-Line StepperConfiguration
Configuration: - Projection Lens (NA0.45 to 0.63) - Exposure field:（22mm × 22mm to 17×26mm） - Resolution: <350nm - Distortion: <35nm - D-scope (Alignment precision: <40nm) - 6inch reticle changer (for Canon standard reticle cassette) - 200mm(8inch) standard wafer handling kit - Chuck maintenance unit - Pellicle particle checker (stand off 6.3mm) - Signal tower (3 colors) - Left inline kit for TEL ACT8 - CE mark Option: - 200mm special wafer handling kit* *For thickness range 1200 - 1700um with SEMI standard Notch, and +/-100um warpage. Includes special chuck & 3pins and special wafer transfer system. - Additional reticle library (for canon standard reticle cassette) - Reticle barcode reader Software: - Recipe Server - GEM Online (Canon standard specifications) - Spiral PA function, TVPATDI (Rotation range up to 90,000ppm) - Recipe server additional functions *ARC/RDM function, Die layout, X,Y coordinate & auto recipe upload function. - Focus Z figure resetting function for FPA-3030i5aOEM Model Description
The FPA-3030i5a can be equipped with a handling system that enables the selection of wafer diameters from 50mm (2inch) to 200mm (8inch) to support a variety of different compound semiconductor wafer sizes and materials.Documents
No documents
CANON
FPA-3030i5a
Verified
CATEGORY
Steppers & Scanners
Last Verified: 19 days ago
Key Item Details
Condition:
Used
Operational Status:
Unknown
Product ID:
116235
Wafer Sizes:
8"/200mm
Vintage:
Unknown
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
CANON
FPA-3030i5a
CATEGORY
Steppers & Scanners
Last Verified: 19 days ago
Key Item Details
Condition:
Used
Operational Status:
Unknown
Product ID:
116235
Wafer Sizes:
8"/200mm
Vintage:
Unknown
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
Description
i-Line StepperConfiguration
Configuration: - Projection Lens (NA0.45 to 0.63) - Exposure field:（22mm × 22mm to 17×26mm） - Resolution: <350nm - Distortion: <35nm - D-scope (Alignment precision: <40nm) - 6inch reticle changer (for Canon standard reticle cassette) - 200mm(8inch) standard wafer handling kit - Chuck maintenance unit - Pellicle particle checker (stand off 6.3mm) - Signal tower (3 colors) - Left inline kit for TEL ACT8 - CE mark Option: - 200mm special wafer handling kit* *For thickness range 1200 - 1700um with SEMI standard Notch, and +/-100um warpage. Includes special chuck & 3pins and special wafer transfer system. - Additional reticle library (for canon standard reticle cassette) - Reticle barcode reader Software: - Recipe Server - GEM Online (Canon standard specifications) - Spiral PA function, TVPATDI (Rotation range up to 90,000ppm) - Recipe server additional functions *ARC/RDM function, Die layout, X,Y coordinate & auto recipe upload function. - Focus Z figure resetting function for FPA-3030i5aOEM Model Description
The FPA-3030i5a can be equipped with a handling system that enables the selection of wafer diameters from 50mm (2inch) to 200mm (8inch) to support a variety of different compound semiconductor wafer sizes and materials.Documents
No documents