FPA-3030EX6
Category
Steppers & ScannersOverview
The performance of previous model FPA-3000EX6 steppers was inherited, and the highest-level of resolution (150 nm), overlay accuracy (25 nm) and productivity (throughput *121 wph) were achieved among KrF excimer laser steppers in the same class. *200 mm (8 inch) wafer, 60 shots
Active Listings
0
Services
Inspection, Insurance, Appraisal, Logistics
Top Listings
- No products found