FPA-6000ES6
Category
Steppers & ScannersOverview
"This step-and-scan system comes with a single stage lithography tool and 0.86 NA. It comes with NA KrF lens with 90nm. The Canon FPA-6000 ES6 can be configured for 200mm or 300mm wafers. Throughput for 300mm is ≥100wph (300mm,122shots) and for 200mm is ≥ 170wph."
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CANON
FPA-6000ES6
Steppers & ScannersVintage: 2004Condition: UsedLast VerifiedOver 60 days agoCANON
FPA-6000ES6
Steppers & ScannersVintage: Condition: UsedLast VerifiedOver 60 days agoCANON
FPA-6000ES6
Steppers & ScannersVintage: Condition: UsedLast Verified16 days agoCANON
FPA-6000ES6
Steppers & ScannersVintage: 2004Condition: UsedLast VerifiedOver 60 days ago
