ASML provides chipmakers with everything they need – hardware, software and services – to mass produce patterns on silicon through lithography.

ASML

TWINSCAN XT:1950i

HDD included

Resolution: 38nm
Overlay: 4 nm SMO
7 nm MMO
Laser Power: 60W
148wph
(125 exp 30 mJ)

Key Specifications
1.Resolution: 38nm Overlay: 4nm SMO / 7nm MMO
2.Throughput: 148wph (300mm with 125 exposures at 30 mJ)
3.Received & In-Service Model # XT:1950Hi (300mm) Projection Lens
4.ZEISS Starlith 1950 with max NA of 1.35 or equivalent Illumination System
5.AERIAL XP Illumination System – P-Type Illuminator Alignment — Blue Align with Athena Narrow Marks Leveling
6.Focus and Field-by-Field Leveling Reticle Management
7.2 Load Ports Laser
8.CYMER XLR-560i 193nm 60W/6khz Laser with E95 bandwidth monitoring Environment
9.Class 1 Environment with Semi compliant MENV and FIMS assemblies Controls
10.UNIX/SUN Architecture

Standard Capabilities -1
– Focus Spot Monitoring
– Circuit Dependant Focus Edge Clearance
– CD-FEC – Dual E-Chucks (bonded SiSiC)
– Image Streaming – Lot Streaming and LS-MATCH2 (XT)
– Lot Overhead Reduction 1 and 2
– Productivity Enhancement Package PEP XT:1950Hi
– In-situ Metrology (ILIAS software and sensor module)
– LithoGuide ILIAS (SAMOS and PUPICOM)
– UNICOM XT – DoseMapper ArF
– QUASAR XL (15 slot)
– Reticle Shape Correction
– 2DE Grid Calibration
– TWINSCAN Overlay Package TOP XT:1950Hi Additional Options
– WATER COOLING FOR ELECTRONICS CABINET – CUSTOMIZED ILLUMINATION
– multiple DOEs – Integrated Reticle Libary IRL-XP for H-SPEC systems
– Integrated Reticle Inspection System IRIS-XT
– Reticle Streaming – SpotLess G & H
– GridMapper TWINSCAN

Standard Capabilities -2
– FSM Flex Package for TWINSCAN
– Aux Port 300mm FOUP/25 Wafer
– SMASH XY Reticles – -40nm Defect – -Single Lot Tst Overlay Support Equipment
– Power Conditioner – 135 kVA Power Conditioning and Distribution Unit. TEAL model number PCDU-XT1900
– XCDA Gas Purification System Backup Purifier Canister: Optics Series, 10 MH, SS
– XCDA Gas Purification System Bypass Manifold: Manifold Three Valve 10M – Filter Housing – Cabinet, ESI VaporSorb EX2600
and Filter Set Standards and Compliance
– CE marked


TWINSCAN XT:1950i

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TWINSCAN XT:1950i

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TWINSCAN XT:1950i

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