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TWINSCAN NXT:2000i
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Steppers & ScannersOverview
The TWINSCAN NXT:2000i delivers outstanding overlay, focus control and cross-matching for high-volume manufacturing of advanced Logic and DRAM nodes. The TWINSCAN NXT:2000i is a high-productivity, dual-stage immersion lithography tool designed for volume production of 300 mm wafers at advanced nodes.
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