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TWINSCAN NXT:1970Ci
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Steppers & ScannersOverview
The TWINSCAN NXT:1970Ci delivers high productivity and excellent image resolution using a dual-stage concept. The TWINSCAN NXT:1970Ci step-and-scan system is a high-productivity, dual-stage immersion lithography tool designed for volume production of 300 mm wafers at mature nodes.
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