ASML provides chipmakers with everything they need – hardware, software and services – to mass produce patterns on silicon through lithography.

ASML

The PAS 5500/200 was the first stepper to incorporate ASML’s revolutionary AERIAL™ Illuminator, a versatile component that provides both the flexibility to switch between conventional and off-axis illumination modes and the high intensity to enable economical IC mass production.
The i-Line Stepper combines 0.35 micron resolution with outstanding overlay performance. The 5500/200 is among ASML’s most successful types built, and has later been succeeded by an improved version, the PAS 5500/250.

ASML

PAS 5500/200

Steppers & Scanners

Similar Listings

ASML

PAS 5500/200

PAS 5500/200

Steppers & Scanners

Similar Listings

ASML

PAS 5500/200