FX-101S
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PhotolithographyOverview
FPD Scanners Resolution (L/S) (switchable): 3.5 µm (g+h+i-line), 3.0 µm (i-line) (option) Projection magnification: 1:1 Overlay: ≦ ±0.6 µm Plate size: 2,880 mm × 3,130 mm Takt time: 70 sec./plate Conditions: 4 scans, g+h+i-line, 30 mJ/cm2
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