Overview

Step-and-Repeat Scanning System NSR-S207D, a lens-scanning KrF excimer stepper for mass production of 110nm advanced devices incorporating an ultra-high N.A. lens. The NSR-S207D incorporates an ultra-high N.A. (N.A.O.82) projection lens, for the KrF excimer laser (248nm wavelength), and uses a newly developed body to significantly improve throughput performance and alignment accuracy.