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EDWARDS 306
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    Key Item Details

    Condition:Used

    Operational Status:

    Product ID:66677

    Wafer Sizes:Unknown

    Vintage:Unknown

    Description

    No description available

    Configuration

    Specifications: Custom sample rotation head Four pocket Ebeam station Thin Film monitor (IL820) Preclean station Preheat station Oxford Cryosystem’s cryopump E8DP12 Scroll pump FL400 Chamber RF7 Flip control assembly

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    OEM Model Description

    None Provided

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