Description
No descriptionConfiguration
Software Version LSA 05.09 Build 05 CIM SECS, GEM Process Laser Spike Anneal Main System Remote Rack 1 OK Main System EFEM 1 OK Main System Chamber 1 OK Factory Interface FOUP 2 OK Heat Exchanger 1 OKOEM Model Description
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VEECO / ULTRATECH
LSA100A
Verified
CATEGORY
RTP/RTA
Last Verified: Over 30 days ago
Key Item Details
Condition:
Used
Operational Status:
Unknown
Product ID:
106076
Wafer Sizes:
12"/300mm
Vintage:
2010
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
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VEECO / ULTRATECH
LSA100A
CATEGORY
RTP/RTA
Last Verified: Over 30 days ago
Key Item Details
Condition:
Used
Operational Status:
Unknown
Product ID:
106076
Wafer Sizes:
12"/300mm
Vintage:
2010
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
Description
No descriptionConfiguration
Software Version LSA 05.09 Build 05 CIM SECS, GEM Process Laser Spike Anneal Main System Remote Rack 1 OK Main System EFEM 1 OK Main System Chamber 1 OK Factory Interface FOUP 2 OK Heat Exchanger 1 OKOEM Model Description
None ProvidedDocuments
No documents