A single-wafer, cassette-to-cassette rapid thermal processor, capable of processing in inert or corrosive ambient.

Mattson Technology Inc. sold AG Associates rapid-thermal processing (RTP) product line to Metron Technology. Metron will assume exclusive ownership of the 4000 and 8000 series RTP product line and begin distribution of spare parts for the installed base from its service locations in Southeast Asia, Europe and the United States.


METRON / AG ASSOCIATES

HEATPULSE 4100

The AG Associates Heatpulse4100 rapid thermal anneal system contains a subsystem for each of the following:
• Electronics (including a dedicated microprocessor)
• Mass-flow-controlled gas handling
• Cooling
• ULPA filtration
• Mechanical assemblies

AG Associates Heatpulse 4100 Rapid Thermal Anneal equipment APPLICATIONS:
The Heatpulse 4100 system is a versatile tool which can be useful for many applications, such as (but not limited to):
• Silicon dielectric growth
• Implant annealing
• Glass re-flow
• Silicide formation and annealing
• Nitridation of metals
• Contact alloying
• Oxygen donor annihilation

AG Associates Heatpulse 4100 Physical Dimensions

Width: 40 in. (102 cm)
Depth 42 in. (107 cm)
Height 82 in. (208 cm)
Weight:: 1800 lbs (816 kg)

HEATPULSE 4100

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METRON / AG ASSOCIATES

HEATPULSE 4100

METRON / AG ASSOCIATES

HEATPULSE 4100

METRON / AG ASSOCIATES

HEATPULSE 4100

METRON / AG ASSOCIATES

HEATPULSE 4100

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METRON / AG ASSOCIATES

HEATPULSE 4100