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6" Fab For Sale from Moov - Click Here to Learn More
6" Fab For Sale from Moov - Click Here to Learn More
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6" Fab For Sale from Moov - Click Here to Learn More
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CENTURA DPN

Category
RTP/RTA
Overview

The AMAT CENTURA METAL DPS is a system that was introduced in 1996 for HDP etching of metal and silicon films. It uses AMAT’s DPS (Decoupled Plasma Source) technology. The DPS Metal Etch Centura and DPS Silicon Etch Centura are designed for advanced applications, primarily for deep submicron devices (0.25-micron).

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