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ULVAC EX 550-C10
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    Key Item Details

    Condition:Used

    Operational Status:

    Product ID:26113

    Wafer Sizes:Unknown

    Vintage:1987

    Description

    Form : Front Door & Batch Type Vacuum Pump : CRYO + RP Chamber : dia.650_H800 SUS Body Evaporation source : Electron Beam type (Crucible _ 4) Deposition material : Metal Application : Research and Development

    Configuration

    Form : Front Door & Batch Type Vacuum Pump : CRYO + RP Chamber : dia.650×H800 SUS Body Evaporation source : Electron Beam type (Crucible × 4) Deposition material : Metal Application : Research and Development

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