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ULVAC EBX 8C
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    Key Item Details

    Condition:Used

    Operational Status:

    Product ID:51546

    Wafer Sizes:Unknown

    Vintage:1986

    Description

    Form : Front Door & Batch Type Vacuum Pump : CRYO Pump + Rotary Pump Chamber : _500_H600 SUS Body Substrate Holder : Flat Plate Revolution Evaporation source(1) : Electron Beam type (Crucible _ 4) Evaporation source(2) : Resistance heating type Deposition material : Metal Application : Research and Development

    Configuration

    Form : Front Door & Batch Type Vacuum Pump : CRYO Pump + Rotary Pump Chamber : □500×H600 SUS Body Substrate Holder : Flat Plate Revolution Evaporation source(1) : Electron Beam type (Crucible × 4) Evaporation source(2) : Resistance heating type Deposition material : Metal Application : Research and Development

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    OEM Model Description

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