Description
No descriptionConfiguration
Form : Load lock Type (Large tray transfer) Substrate Size : 3 ""6"" Wafer (trays : φ 360 Al ) Configuration : Reaction chamber (SUS304 φ 495) Transfer chamber (SUS304 800 x 780) Electrodes : φ 420 mm (aluminum) / Top & Bottom Heating : Stage Heating 300°C Power supply : RF 500 W 13.56MHz Process Gas : 6 systems (SiH4, N2O, CF4, CoF2…) Transfer Robot : Articulated Arm Vacuum Robots (JEL) Vacuum Pump : Dry Pump HR60 (ULVAC) Control system : sequencer Operating inputs : touch panel Recipe : Max. 15 recipes or moreOEM Model Description
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SAMCO
PD-3800LT
Verified
CATEGORY
PECVD
Key Item Details
Condition:
Used
Operational Status:
Unknown
Product ID:
26000
Wafer Sizes:
Unknown
Vintage:
2011
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Logistics Support
Available
Money Back Guarantee
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Transaction Insured by Moov
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Refurbishment Services
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View AllSAMCO
PD-3800LT
Verified
CATEGORY
PECVD
Last Verified: Over 60 days ago
Key Item Details
Condition:
Used
Operational Status:
Unknown
Product ID:
26000
Wafer Sizes:
Unknown
Vintage:
2011
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
Description
No descriptionConfiguration
Form : Load lock Type (Large tray transfer) Substrate Size : 3 ""6"" Wafer (trays : φ 360 Al ) Configuration : Reaction chamber (SUS304 φ 495) Transfer chamber (SUS304 800 x 780) Electrodes : φ 420 mm (aluminum) / Top & Bottom Heating : Stage Heating 300°C Power supply : RF 500 W 13.56MHz Process Gas : 6 systems (SiH4, N2O, CF4, CoF2…) Transfer Robot : Articulated Arm Vacuum Robots (JEL) Vacuum Pump : Dry Pump HR60 (ULVAC) Control system : sequencer Operating inputs : touch panel Recipe : Max. 15 recipes or moreOEM Model Description
None ProvidedDocuments
No documents