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SAMCO PD-3800LT
    Description
    No description
    Configuration
    Form : Load lock Type (Large tray transfer) Substrate Size : 3 ""6"" Wafer (trays : φ 360 Al ) Configuration : Reaction chamber (SUS304 φ 495) Transfer chamber (SUS304 800 x 780) Electrodes : φ 420 mm (aluminum) / Top & Bottom Heating : Stage Heating 300°C Power supply : RF 500 W 13.56MHz Process Gas : 6 systems (SiH4, N2O, CF4, CoF2…) Transfer Robot : Articulated Arm Vacuum Robots (JEL) Vacuum Pump : Dry Pump HR60 (ULVAC) Control system : sequencer Operating inputs : touch panel Recipe : Max. 15 recipes or more
    OEM Model Description
    None Provided
    Documents

    No documents

    SAMCO

    PD-3800LT

    verified-listing-icon

    Verified

    CATEGORY
    PECVD

    Last Verified: Over 60 days ago

    Key Item Details

    Condition:

    Used


    Operational Status:

    Unknown


    Product ID:

    26000


    Wafer Sizes:

    Unknown


    Vintage:

    2011

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    Transaction Insured by Moov
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    Similar Listings
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    SAMCO PD-3800LT

    SAMCO

    PD-3800LT

    PECVD
    Vintage: 2011Condition: Used
    Last VerifiedOver 60 days ago

    SAMCO

    PD-3800LT

    verified-listing-icon
    Verified
    CATEGORY
    PECVD
    Last Verified: Over 60 days ago
    listing-photo-b39c67e297bd47819cdf1b4db0d0ba2b-https://d2pkkbyngq3xpw.cloudfront.net/moov_media/3.0-assets/photo-coming-soon-small.png
    Key Item Details

    Condition:

    Used


    Operational Status:

    Unknown


    Product ID:

    26000


    Wafer Sizes:

    Unknown


    Vintage:

    2011


    Logistics Support
    Available
    Money Back Guarantee
    Available
    Transaction Insured by Moov
    Available
    Refurbishment Services
    Available
    Description
    No description
    Configuration
    Form : Load lock Type (Large tray transfer) Substrate Size : 3 ""6"" Wafer (trays : φ 360 Al ) Configuration : Reaction chamber (SUS304 φ 495) Transfer chamber (SUS304 800 x 780) Electrodes : φ 420 mm (aluminum) / Top & Bottom Heating : Stage Heating 300°C Power supply : RF 500 W 13.56MHz Process Gas : 6 systems (SiH4, N2O, CF4, CoF2…) Transfer Robot : Articulated Arm Vacuum Robots (JEL) Vacuum Pump : Dry Pump HR60 (ULVAC) Control system : sequencer Operating inputs : touch panel Recipe : Max. 15 recipes or more
    OEM Model Description
    None Provided
    Documents

    No documents

    Similar Listings
    View All
    SAMCO PD-3800LT

    SAMCO

    PD-3800LT

    PECVDVintage: 2011Condition: UsedLast Verified: Over 60 days ago