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AIXTRON CRIUS II
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    Key Item Details

    Condition:Used

    Operational Status:

    Product ID:28267

    Wafer Sizes:Unknown

    Vintage:2011

    Description

    400/230VAC, 3ph, 40/50Hz, w/ 10ea TDK/Lambda GEN 60-250 DC power supplies, 1ea Edwards iXH645H HV vacuum pump, 1ea Edwards nXDS10i vacuum pump, 1ea Agilent SH-100 vacuum pump, 1ea Lauda WKL 230 chiller, 2ea Lauda RM 25 S/G chiller, 5ea Lauda RM 6 S/K chiller. Includes: 1ea Jupiter Scientific Europa dry scrubber unit; 1ea Affinity EWE-08CH-ED44CBD0 heat exchanger; 1ea SMC HRS018-WN-10-JM chiller; 1ea MV Products cold trap; 1ea APC uninterruptible power supply.

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    OEM Model Description

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