Description
Condition: Complete / Working Status: Installed in fabConfiguration
Novellus / Varian 3290 Sputtering System Configured: 150mm Process: Titanium 2 Titanium chambers station RF:NA station 1~4:Titanium normally Process: Station 1 (RF) = NA; Stations 2-4 = Titanium HEATER: Stations 1-4 = Y Heater controller: Stations 1-4 = Euro 919 Inner p.s.: Station 1 = NA; Stations 2-4 = 6KW Outer p.s.: Station 1 = NA; Stations 2-4 = 12KW MAGNET P.S.: Station1 = NA; Stations 2-4 = HP6286A Shutter: Station 1 = NA; Stations 2-4 = Y Cryo pump: CTI Torr 8 RF turbo pump: NA UPGRADE: FLOPPY DRIVER TO CF DRIVER MODIFY: UTILITY BOX ASSY Station argon pipeOEM Model Description
None ProvidedDocuments
NOVELLUS / VARIAN
3290
Verified
CATEGORY
PVD / Sputtering
Last Verified: 13 days ago
Key Item Details
Condition:
Used
Operational Status:
Installed / Running
Product ID:
112434
Wafer Sizes:
6"/150mm
Vintage:
Unknown
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
NOVELLUS / VARIAN
3290
CATEGORY
PVD / Sputtering
Last Verified: 13 days ago
Key Item Details
Condition:
Used
Operational Status:
Installed / Running
Product ID:
112434
Wafer Sizes:
6"/150mm
Vintage:
Unknown
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available