Founded as Comptech, the company established itself as a multi-faceted vertically integrated vacuum systems, components and services supplier. This capability continued to grow as the company was acquired by Alcatel in the 1980's and then re-aquired and renamed MeiVac in the 1990's. In May 2006, MeiVac acquired the Sputter Source business of US, Inc. and combined it with its Throttle Valve business to form the MeiVac US Components Division.

Meivac then was acquired by Ferrotec.

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