DENTON VACUUM

EXPLORER

Thin Film Deposition System 

Includes: CTI Cryogenics 8200 helium compressor; Adixen ACP40LG vacuum pump; spare Telemark 861 deposition controller; spare Maxtek MDC-260 deposition controller.

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Details Attached 

Metals/Chemicals used:  LiCO, LiPON, and Li 

ELECTROLYTE DEPOSITION SYSTEM, DENTON VACUUM, CO. #DT000, MDL. RELIANT, MFG. 3/07, LIST SHOWS RELIANT RF SPUTTER SYSTEM WITH LIPON DEPOSITION TOOL, 2' X 2' X 3' HIGH STEEL CHAMBER, (2) ANGSTROM SCIENCES RF CATHODES WITH POWER SUPPLIES/CONTROLLERS, (2) RF TUNERS, CTI CRYOGENICS CRYO-TORR 8 CRYOGENIC PUMP WITH MONITOR, KYKY TURBO PUMP WITH MDL. 1200H CONTROLLER, (2) ADVANCED ENERGY DRESSLER CESAR RF POWER GENERATORS, RELATED PRESSURE MONITORS, ISOLATION VALVES, B&W MDL. TRP-90 VACUUM PUMP, STAND ALONE POWER SUPPLY/CONTROL, COMPUTER CONTROL SYSTEM, RELATED HARDWARE, SOFTWARE, (2) VAT GATE VALVES, CTI CRYOGENICS 8200 COMPRESSOR, ALL RELATED EQUIPMENT, COMPONENTS

denton_exporer.docx

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