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ATC 2200 UHV
Category
PVD / SputteringOverview
ATC 2200 UHV. (6) A330-XP 3" UHV sputter sources with in-situ tilt, 1200 l/s turbopump, 800°C, rotating substrate heater with RF bias, computer control and automated (9) substrate cassette elevator in the load-lock for 150 mm Ø substrates.
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