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EDWARDS STP-A1303C
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    Key Item Details

    Condition:Used

    Operational Status:

    Product ID:74281

    Wafer Sizes:Unknown

    Vintage:2002

    Description

    No description available

    Configuration

    ONLY THE PUMP. CABLES AND CONTROLLER NOT INCLUDED. HAS BEEN USED WITH BCl3 Cl2, HBr, SF6. HAS NOT BEEN DECONTAMINATED. WILL REQUIRE CLEANING BEFORE USE.

    Documents
    No documents
    OEM Model Description

    turbomolecular pump

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