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    Key Item Details


    Operational Status:

    Product ID:65258

    Wafer Sizes:Unknown



    No description available


    Dry Pumping System contains 200 m3h Dry Screw Pump and 1800 m3H Blower. 200-240V 3Ph.

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    OEM Model Description

    The iH160 system has an HCDP160 dry pump. The HCDP pump has an enclosed, water-cooled motor. The iH system is therefore suitable for applications in clean environments where fan cooling of motors is unacceptable.

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