ULVAC

G50SA 

PKS-016

CRYO-U8H

Cryopump that uses a two-stage type GM cryocooler, and is capable of high vacuum pumping.

CRYO-U8HSP

DA-120S

DA-241S

Speciality Cryopumps for Sputtering Process

CRYO-U10HSP

DA-60S

CRYO-U10PU

CRYO-U20P

PRC-012A

DA-121DE

GLD-N201

Cryopump that uses a two-stage type GM cryocooler, and It is capable of high vacuum pumping

CRYO-U16P

DA-121D

DOP-301SB

CRYO-U12H

CRYO-U6H

VDN902

LR3601-R

GLD-201A

Multi-Stage Roots Type Dry Vacuum Pump - Pump is designed for CVD or dry etching applications / designed for PVD, evaporation, or heat treatment processes/designed to handle process gasses that generate powder by products such as Si crystal growing furnaces

LR600

LR300

G-100DD

LR1800

DAL-181D

LR90

DA-40S

CRYO-U10HL

DA-60D

DOP-50S4V

VDN301

GCD-201X

PX-201N

UTM-150

DA-30S

CRYO-U8HL

PMB-024C

Multi-Stage Roots Type Dry Vacuum Pump - Pump is designed for CVD or dry etching applications/designed for PVD, evaporation, or heat treatment processes/ designed to handle process gasses that generate powder by products such as Si crystal growing furnaces

ULVAC

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Top ULVAC Pumps / Compressor

G50SA

PKS-016

CRYO-U8H

CRYO-U8HSP

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