ULVAC

DA-40S

DIS-500	

GLD-210B

G-100DC

DA-121DE

4700- TERMINATOR .SCA.VP2

DA-121D

CRYO-U22H

GHD-030

G-100DD

UR1200	

G-100D

VD301

DA-60D

G50SA 

CRYO-U8H

PKS-016

Cryopump that uses a two-stage type GM cryocooler, and is capable of high vacuum pumping.

CRYO-U8HSP

DA-120S

DA-241S

CRYO-U20P

CRYO-U10PU

DA-60S

Speciality Cryopumps for Sputtering Process

CRYO-U10HSP

DOP-301SB

PRC-012A

GLD-N201

CRYO-U6H

LR3601-R

CRYO-U12H

GLD-201A

Multi-Stage Roots Type Dry Vacuum Pump - Pump is designed for CVD or dry etching applications / designed for PVD, evaporation, or heat treatment processes/designed to handle process gasses that generate powder by products such as Si crystal growing furnaces

LR600

LR300

LR1800

DAL-181D

VDN902

LR90

CRYO-U10HL

DOP-50S4V

VDN301

Cryopump that uses a two-stage type GM cryocooler, and It is capable of high vacuum pumping

CRYO-U16P

GCD-201X

CRYO-U12HSP

PX-201N

UTM-150

DA-30S

CRYO-U8HL

PMB-024C

Multi-Stage Roots Type Dry Vacuum Pump - Pump is designed for CVD or dry etching applications/designed for PVD, evaporation, or heat treatment processes/ designed to handle process gasses that generate powder by products such as Si crystal growing furnaces

UR1800

PMB 006Cs

DIS-251

ULVAC

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Top ULVAC Pumps / Compressor

DA-121D

DA-121DE

DA-60D

DA-40S

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