The Veeco DEKTAK 3030 is a surface profile measuring system designed for measuring the surface profiles of surfaces such as wafers and microelectronic devices. It is capable of measuring surface profiles with a resolution of 0.1 nanometers and a vertical accuracy of 0.25 nanometers. It is also capable of measuring high aspect ratios and precision features. The system uses a stylus-based probe to measure the surface profile, with a stylus force of 0.5 to 5.0 milliNewtons. The system can also be used for measuring surface flatness, surface roughness, and other surface parameters.

VEECO

DEKTAK 3030

DEKTAK 200 SI

V220SI	

Dimension Vx 210

he Dektak 3 Surface Profilometer is an instrument to measure the vertical profile of samples, thin film thickness, and other topographical features, such as film roughness or wafer bowing.
A diamond stylus is moved vertically into in contact with the sample and then moved laterally across the sample for a specified distance and specified contact force. The instrument can measure small surface variations in vertical stylus displacement as a function of position. The Dektak profilometer can measure small vertical features ranging in height from 100 Å to 650,000 Å on a 5″ Diameter Sample Stage.

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DEKTAK 3030

DEKTAK 200 SI

Dimension Vx 210

V220SI

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