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HRP-350
Category
ProfilerOverview
The HRP-250 and HRP-350 tools launch with a lower noise LVDC sensor technology, a new isolation system (HRP-350 only) and a redesigned DuraSharp II stylus. These innovations enable measurement of smaller features and nearly 2x the throughput. The HRP-350 is an automated, advanced surface topography metrology tool, featuring high resolution/high-aspect ratio, stylus-based surface profiling for leading edge 300mm applications. This surface profile measurement tool's ultra-fine 20nm stylus
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