The PA300 is an analytical prober conforming to EN 61010 - 1: 1993-04 which corresponds to UL 3101-1: 1993 and IEC 1010-1: 1992. By means of the PA300 electrical measurements on wafers and substrates up to a diameter of 300mm can be made. The only electrical connection to the measuring object is through the probecard, the probehead and the chuck.

SUSS MicroTec offers a wide product portfolio of high quality process solutions for the semiconductor industry and related markets. SUSS portfolio covers a comprehensive range of products and solutions for backend lithography, wafer bonding, and photomask processing, complemented by micro-optical components. 

SUSS MicroTec / KARL SUSS

PA300

controller
 control keyboard and joystick
 needle support set
 camera

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PA300

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