CENTURA DPS
Category
Plasma EtchOverview
The AMAT Centura DPS is a highly efficient semiconductor processing system with a unique architecture that groups four processing stations and two auxiliary chambers around a central transfer module housing an ultra-reliable magnetically-coupled vacuum robot. It is designed for ≤200mm wafer fabrication and supports various applications such as Chemical Vapor Deposition (CVD), epitaxy, etch, plasma nitridation, and Rapid Thermal Processing (RTP).
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- CENTURA DPSPlasma EtchVintage: 2000Condition: UsedLast Verified15 days ago
- CENTURA DPSPlasma EtchVintage: 2010Condition: UsedLast Verified30 days ago
- CENTURA DPSPlasma EtchVintage: Condition: Parts ToolLast VerifiedOver 60 days ago
- CENTURA DPSPlasma EtchVintage: 2001Condition: UsedLast Verified27 days ago