Triase+™ SFD™ TiN has been widely adopted by using SFD™ technology that has both merits of excellent step coverage of ALD and high productivity of CVD.

TEL / TOKYO ELECTRON

TRIASe+ SFD TiN

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TRIASe+ SFD TiN

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TEL / TOKYO ELECTRON

TRIASe+ SFD TiN

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