Used KLA / SPTS DELTA fxP Equipment

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Marketplace > PECVD > KLA / SPTS > DELTA fxP

KLA / SPTS

DELTA fxP

Overview

Delta fxP - a cluster system supporting up to 6 PECVD chambers. The fxP is an 8-sided cluster system supporting up to 6 process modules for the ultimate in throughput, availability and productivity.

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DELTA fxP

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