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Marketplace > PECVD > APPLIED MATERIALS (AMAT) / APPLIED KOMATSU TECH (AKT) > 15K PECVD
APPLIED MATERIALS (AMAT) / APPLIED KOMATSU TECH (AKT)

15K PECVD

Category
PECVD
Overview

AKT-15K PECVD(1,200mm x 1,300mm) PECVD systems deposit doped and undopedamorphous silicon, silicon nitride, silicon oxide and oxynitride PECVD systems deposit films on glass substrates more than 70 times larger than 300mm wafers

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