AKT-15K PECVD(1,200mm x 1,300mm)
PECVD systems deposit doped and undopedamorphous silicon, silicon nitride, silicon oxide and oxynitride
PECVD systems deposit films on glass substrates more than 70 times larger than 300mm wafers

During fiscal 1999, Applied Materials purchased the remaining 50 percent of Applied Komatsu Technology, Inc. (AKT) that it did not previously own. 
AKT supplies equipment  for fabricating flat panel displays (FPDs) that are used in notebook PCs, desktop monitors, TVs and other applications. 

15K PECVD

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