LAM RESEARCH CORPORATION

**PARTS**

16-194498-01 Susceptor Lam Research Susceptor Novellus Susceptor CVD Susceptor Wafer Susceptor Semiconductor Susceptor CVD Chamber Susceptor Semiconductor Chamber Parts Wafer Support Substrate Support Wafer Holder CVD Chamber Parts Thin Film Deposition Parts Precision Machined Parts Semiconductor Spare Parts OEM Replacement Parts Lam Research Spare Parts Novellus Spare Parts Vacuum Chamber Components Precision CNC Machining Semiconductor Equipment Parts wafer carrier disk wafer carrier Susceptor Semiconductor equipment parts CVD Cavity parts CVD carrier plate wafer stage Lam Research Component Novellus Component OEM Replacement parts Semiconductor consumables Precision machined parts

 1. feature OEM Equal quality, high precision CNC Excellent processing performance, superior thermal conductivity, high temperature resistance, corrosion resistance, low particulate contamination, high dimensional accuracy, and improved wafer temperature uniformity and process stability. 2. Customized specifications Custom sizes, tolerances, and materials (aluminum alloy, graphite, etc.) can be made according to drawings or samples. SiC Coating, surface treatment, and packaging support OEM Manufactured to specifications. 3. OEM / ODM Serve Provides reverse engineering, sample mapping, CNC Precision machining, surface treatment, quality inspection, cleanroom cleaning and packaging, and mass production services. 4. Advantages of OEM Experience in semiconductor precision component machining, high-precision machining capabilities, strict quality control, and fast delivery. OEM Substitutability and stable process quality. 5. Enterprise Products / Industrial Applications Applicable to LAM Research / Novellus CVDThe equipment is used in wafer carrier, heating, and thin film deposition processes, and is suitable for equipment repair, preventative maintenance, and... OEM Replace the parts. 6. Service Process Requirements confirmation → Image/Sample Evaluation → Engineering Analysis → Quotation → Prototyping → Mass production → Quality Inspection → Clean packaging → Shipment.

 OEM P/N : 16-194498-01 Product Name : Susceptor Applicable equipment: LAM Research / Novellus CVD Platform belong Chamber Parts (Wafer carrier platform) Main function: Supports the wafer and provides uniform heat conduction, ensuring the wafer is in a stable condition. CVD Achieving uniform heating, improving film thickness uniformity, and reducing particulate contamination during the manufacturing process are... CVD The cavity's key core component

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Mono-Polar, 297mm,temp. 20 - 80, FlexGX (17kW)

Parts used in: LAM 2300 KiYo CX, and LAM 2300 Versys Metal M.

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Ontrak - DSS200 Scrubber - Parts .pdf

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