TAKATORI

ATRM 2100

ATRM 2100D

ATM 1100E

ATM-1100B

ATM 12000DR

ATM 9500

Protective tape remover for 12-inch (300 mm) wafers.
Partition between the wafer cassette and maintenance section minimizes the space for a clean room by putting the maintenance section outside the clean room.
Holding a wafer precisely with a unique wafer table and removing the protective tape without giving stress.
Interactive mode allows easier operation.
(Option) FOUP cassette, AGV and OHT protocol, built-in UV radiation unit.


ATRM-4000

ATM 1100C

DM 800B

ATM 2100 

ATM 8100

TEAM-300

ATM-3100

Fully automatic protection tape peeler for D/C frame

TEAM-200

ATM 3000

ATM-8000

SAM 8

ATRM 2200

TSW-1

FULLY-AUTOMATIC WAFER BG TAPE LAMINATION MACHINE

ATM-3100A

AMR-2200G	

ATM-1100G

ATRM 2000B

2100D

TRO 25CC

-Thin wafers down to 150 microns
-Warped wafer
-Every other cassette slot applicable
-Integrated UV unit(optional)

ATRM-2300

ATM-1100EF

ATRM 1100

RM 2100

ATM 1100X

TUV 1

ATRM 2200UV

ATM-8200

ATPM 1000B

ATM 5000

ATM 8100S

DAM 812MS

ATM 12000

ATRM 5000

ATRM 8200

ATM-8200A

ATRM 2100B

ATM 2200

ATM-1100K

AMR 2100

VTM-200M

FTL 200

ATM 1100

ATRM 2200G

ATRM 2100X

ATM 9500NS

ATM-1100GC

DAM 812MP

VSM 300M	

TUV 12

ATM 1100D

ATM TEAM-200

MM 65

TEAM 200UV

ATRM 8200A

ATM 2100D

ATM 9300

TAKATORI

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ATRM 2100

ATRM 2100D

ATM 1100E

ATM-1100B

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