Overview

The IVS 130 is a precision measurement tool designed for use on the most difficult layers, including shallow trench isolation (STI) and tungsten-plug chemical mechanical polishing (CMP) processes. It features optics and proprietary spatial filters for consistent performance across diverse applications and processes. The system uses the company’s Adaptive RG metrology software to reduce ramp-up time and increase measurement success rates and precision on STI processes. The IVS 130 also features an FSF focus system that locates the focus plane independent of thin film effects, and a laser focusing system that improves repeatability and throughput on varied topographies. With a mean time between failure (MTBF) of over 1,500 hours and modest quarterly maintenance, the IVS 130 ensures optimal system availability and years of problem-free operation.