The PHEMOS-1000 is a high-res emission microscope for pinpointing semiconductor device failures by detecting weak light and heat emissions caused by defects. It seamlessly integrates with a general-purpose prober, leveraging familiar sample setups for versatile analysis. Optional laser scan system enables high-res pattern images. Multiple detectors cater to diverse analysis techniques. Different types of detectors are available for various analysis techniques such as emission analysis, thermal analysis, and IR-OBIRCH analysis. The PHEMOS-1000 supports a wide variety of tasks and applications ranging from prober socket boards to a large-size 300 mm wafer prober

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The PHEMOS-X is a high-resolution emission microscope that pinpoints failure locations in semiconductor devices by detecting the weak light emissions and heat emissions caused by defects.

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