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Marketplace > Metrology > KLA > ASET-F5

ASET-F5

Category
Metrology
Overview

the ASET-F5, our third generation spectroscopic ellipsometer, which addresses the difficult film measurement needs that come from the continuing evolution of film development driven by shorter line widths. These new films demand an increasing capability to characterize and control them in production, a capability provided by the ASET-F5.

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