Overview

The SVG / PERKIN ELMER / ASML Micralign 761HT is a projection mask alignment system. The key to the design was a 16-element lens system that produced an extremely focused light source. The resulting system could produce 2.5 μm features. The Micralign improved the yield of operational ICs from an average of 10% to over 50%, and as great as 70% in many applications.