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6" Fab For Sale from Moov - Click Here to Learn More
6" Fab For Sale from Moov - Click Here to Learn More
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6" Fab For Sale from Moov - Click Here to Learn More
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CANON MPA 600
    Description
    Lithography Lithography Machine
    Configuration
    No Configuration
    OEM Model Description
    The Canon MPA-600 FA is a one-to-one projection aligner for 6" wafers. It uses a high intensity Mercury lamp to expose the wafer through a mask plate and a series of mirrors. The wafer scans horizontally through an arc of light at a specified scan speed to expose the light-sensitive positive photoresist that was coated onto the wafer. The Canon MPA-600 FA has a wafer size of 5 or 6 inches and a mask size of 6 or 7 inches square. It uses a projection mirror with a magnification of 1X and an illuminator that is a 2kW super high pressure mercury lamp. The exposure wavelengths used are 365 nm (i-line), 405 nm (h-line), and 436 nm (g-line). The resolution is 2.5 um over the entire 6 inch surface and the depth of focus is more than +/- 6 um at linewidth 1.5 um. The alignment accuracy is 3 sigma, < or = 0.6 um.
    Documents

    No documents

    CANON

    MPA 600

    verified-listing-icon

    Verified

    CATEGORY
    Mask/Bond Aligners

    Last Verified: 14 days ago

    Key Item Details

    Condition:

    Used


    Operational Status:

    Unknown


    Product ID:

    115649


    Wafer Sizes:

    Unknown


    Vintage:

    Unknown


    Have Additional Questions?
    Logistics Support
    Available
    Money Back Guarantee
    Available
    Transaction Insured by Moov
    Available
    Refurbishment Services
    Available
    Similar Listings
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    CANON MPA 600

    CANON

    MPA 600

    Mask/Bond Aligners
    Vintage: 0Condition: Used
    Last Verified14 days ago

    CANON

    MPA 600

    verified-listing-icon
    Verified
    CATEGORY
    Mask/Bond Aligners
    Last Verified: 14 days ago
    listing-photo-f12113bcb4234f2f9c90f1506ad1d53f-https://d2pkkbyngq3xpw.cloudfront.net/moov_media/3.0-assets/photo-coming-soon-small.png
    Key Item Details

    Condition:

    Used


    Operational Status:

    Unknown


    Product ID:

    115649


    Wafer Sizes:

    Unknown


    Vintage:

    Unknown


    Have Additional Questions?
    Logistics Support
    Available
    Money Back Guarantee
    Available
    Transaction Insured by Moov
    Available
    Refurbishment Services
    Available
    Description
    Lithography Lithography Machine
    Configuration
    No Configuration
    OEM Model Description
    The Canon MPA-600 FA is a one-to-one projection aligner for 6" wafers. It uses a high intensity Mercury lamp to expose the wafer through a mask plate and a series of mirrors. The wafer scans horizontally through an arc of light at a specified scan speed to expose the light-sensitive positive photoresist that was coated onto the wafer. The Canon MPA-600 FA has a wafer size of 5 or 6 inches and a mask size of 6 or 7 inches square. It uses a projection mirror with a magnification of 1X and an illuminator that is a 2kW super high pressure mercury lamp. The exposure wavelengths used are 365 nm (i-line), 405 nm (h-line), and 436 nm (g-line). The resolution is 2.5 um over the entire 6 inch surface and the depth of focus is more than +/- 6 um at linewidth 1.5 um. The alignment accuracy is 3 sigma, < or = 0.6 um.
    Documents

    No documents

    Similar Listings
    View All
    CANON MPA 600

    CANON

    MPA 600

    Mask/Bond AlignersVintage: 0Condition: UsedLast Verified:14 days ago
    CANON MPA 600

    CANON

    MPA 600

    Mask/Bond AlignersVintage: 0Condition: UsedLast Verified:14 days ago
    CANON MPA 600

    CANON

    MPA 600

    Mask/Bond AlignersVintage: 0Condition: UsedLast Verified:14 days ago