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Marketplace > Mask Aligners > EVGroup (EVG) > IQ ALIGNER
EVGroup (EVG) IQ ALIGNER
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    Key Item Details

    Condition:Used

    Operational Status:

    Product ID:82020

    Wafer Sizes:Unknown

    Vintage:Unknown

    Description

    Exposure

    Configuration

    No Configuration

    Documents
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    OEM Model Description

    "The IQ Aligner allows for imprint processes with stamps and wafers from 150 mm to 300 mm diameter. The tool’s configuration for nanotechnology applications can include stamp release mechanisms and programmable contact force capability. A temperature controlled chuck for large substrates provides unmatched stamp to substrate overlay accuracy. Uniform contact force for high yield large area printing is provided by EVG's proprietary chuck design which supports both soft and hard stamps. The IQ Aligner can be used for micromolding processes for the fabrication of optical elements."

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