IQ Aligner / Semi-Automated Top side Nano imprint Lithography System for 200mm Wafer

EV Group (EVG) is a leading supplier of high-volume production equipment and process solutions for the manufacture of semiconductors, MEMS, compound semiconductors, power devices and nanotechnology devices.
A recognized market and technology leader in wafer-level bonding and lithography for advanced packaging and nanotechnology, EVG’s key products include wafer bonding, thin-wafer processing and lithography/nanoimprint lithography (NIL) equipment, photoresist coaters, as well as cleaning and inspection/metrology systems.

EVGroup (EVG)

"The IQ Aligner allows for imprint processes with stamps and wafers from 150 mm to 300 mm diameter. The tool’s
configuration for nanotechnology applications can include stamp release mechanisms and programmable contact force
capability. A temperature controlled chuck for large substrates provides unmatched stamp to substrate overlay accuracy.
Uniform contact force for high yield large area printing is provided by EVG's proprietary chuck design which supports both
soft and hard stamps. The IQ Aligner can be used for micromolding processes for the fabrication of optical elements."

EVGroup (EVG)

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