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Evolution 64
Category
LithographyOverview
Evolution-64 Nano Imprint Lithography systems from OpTool is fully automatic manufacturing system equipped with polymer stamp manufacturing and final substrate imprint modules. The systems is full area imprint, using Polymer stamp as intermediate stamp. All process parameter will be saved and recall as recipes. The system will produce polymer stamp from indicated stamp and replicate the structure on final (coated) substrates.
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