Overview

FPD Steppers Resolution (L/S): 3.0 μm Exposure field: 132 mm square Exposure wavelength: g+h-line Projection magnification: 1:1.25 Overlay: ≦ ±0.38 μm (3σ) Maximum plate size: 730 × 920 mm Reticle size: 6-in (0.25-in. thickness) Takt time: (30 shots) 65 seconds (40 mJ/cm2)