FX-55S
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LithographyOverview
Resolution (L/S) (switchable): ≦ 3 µm (i-line), ≦ 3.5 µm (g+h+i-line) Projection magnification: 1:1 Overlay: ≦ ±0.6 µm (3σ) Maximum plate size: 1,300 × 1,300 mm Takt time 59 sec./plate Conditions: 4 scans, g+h+i-line, 30 mJ/cm2
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