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6" Fab For Sale from Moov - Click Here to Learn More
6" Fab For Sale from Moov - Click Here to Learn More
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6" Fab For Sale from Moov - Click Here to Learn More
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Marketplace > Lithography > KLA > PROLITH X5

PROLITH X5

Category
Lithography
Overview

PROLITH X5 provides simulation capability for all lithography technologies with particular emphasis on 193nm immersion lithography, spacer-based Self-Aligned Double Patterning ("SADP") and thick resist lithography for 3-D interconnects and MEMS manufacturing.

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