Cluster Tool Tracks (Resist Coater/Developer)

FSI International, Inc. and YieldUP International Corporation announced that the two companies have entered into a definitive agreement for FSI to acquire YieldUP; YieldUP has also granted FSI a royalty-bearing license to its patent portfolio.

FSI International, Inc. was acquired by TEL and the new company profile is TEL FSI, Inc.

TEL / FSI

The Polaris 2000 Cluster is a next-generation system introduced by the Microlithography division of FSI near the close of fiscal 1994. The system boasts higher throughput and enhanced productivity, with a new high capacity feature that allows the robotic handler to move horizontally within the cluster and access more modules. The Polaris 2000 Cluster tool is positioned in both the high throughput manufacturing arena and the leading edge high-resolution technology area, making it attractive for customers who require “mix and match” capability in their manufacturing lines.

TEL / FSI

POLARIS 2000

Lithography

Similar Listings

TEL / FSI

POLARIS 2000

POLARIS 2000

Lithography

Similar Listings

TEL / FSI

POLARIS 2000