Description
Cluster Tool Tracks (Resist Coater/Developer)Configuration
No ConfigurationOEM Model Description
The Polaris 2000 Cluster is a next-generation system introduced by the Microlithography division of FSI near the close of fiscal 1994. The system boasts higher throughput and enhanced productivity, with a new high capacity feature that allows the robotic handler to move horizontally within the cluster and access more modules. The Polaris 2000 Cluster tool is positioned in both the high throughput manufacturing arena and the leading edge high-resolution technology area, making it attractive for customers who require “mix and match” capability in their manufacturing lines.Documents
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TEL / FSI
POLARIS 2000
Verified
CATEGORY
Lithography
Last Verified: 24 days ago
Key Item Details
Condition:
Used
Operational Status:
Unknown
Product ID:
113799
Wafer Sizes:
6"/150mm
Vintage:
Unknown
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
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TEL / FSI
POLARIS 2000
CATEGORY
Lithography
Last Verified: 24 days ago
Key Item Details
Condition:
Used
Operational Status:
Unknown
Product ID:
113799
Wafer Sizes:
6"/150mm
Vintage:
Unknown
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
Description
Cluster Tool Tracks (Resist Coater/Developer)Configuration
No ConfigurationOEM Model Description
The Polaris 2000 Cluster is a next-generation system introduced by the Microlithography division of FSI near the close of fiscal 1994. The system boasts higher throughput and enhanced productivity, with a new high capacity feature that allows the robotic handler to move horizontally within the cluster and access more modules. The Polaris 2000 Cluster tool is positioned in both the high throughput manufacturing arena and the leading edge high-resolution technology area, making it attractive for customers who require “mix and match” capability in their manufacturing lines.Documents
No documents