A semi-automated recovery system designed to collect trace nano-level metallic contaminants from the front and side surfaces of silicon wafers and compound semiconductor wafers. It ensures high analytical precision while minimizing the risk of human contamination.

NAS GIKEN

SC-9200

The SC Series is a compact, semi-automatic sampling device primarily used in laboratories and R&D facilities at semiconductor fabs for surface contamination analysis. It is also suitable for sampling flat surfaces ranging in size from 12 inches to 4 inches where high purity requirements (ppm, ppb, ppt levels) are necessary. This product is easy to operate, highly stable, and reliable, with a recovery rate of over 90%, and is protected by multiple patents. The SC Series can sample only one wafer at a time; however, by changing the fixture, it can sample the surface or edge of any wafer ranging in size from 12 inches to 4 inches. This product should be used in conjunction with a VPD and a clean fume hood. As this is a brand-new device, it takes one month from production and commissioning to crating and shipping. Please note that the price is subject to fluctuations in the yen-dollar exchange rate.

SC-9200

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NAS GIKEN

SC-9200

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