Description
1 chamberConfiguration
1 chamber SMIF : NONE CASSETTE CHAMBER GATE : MANUAL TYPE PROGRESS TYPE: CHAMBER POSITION: INDEXER : 003-9010-03, BROOKS AUTOMATION ALIGNER : 001-2980-64, BROOKS AUTOMATION ROBOT : 001-7500-02, BROOKS AUTOMATION TURBO PUMP (L/L1) : TMP260U, LEYBOLD TURBO PUMP (L/L2) : TMP260SG, LEYBOLD TURBO PUMP (TM) : TMP361C, LEYBOLD PROCESS MODULE-STATION 2 -PROCESS : ION BEAM ETCH -TURBO PUMP : TPH2200U,PFEIFFER BALZERS -RF GENERATOR : RFPP, RF20M -BEAM-HIGH VOLTAGE POWER SUPPLY : SL1200, SPELLMAN -SUPPRESOR-HIGH VOLTAGE POWER SUPPLY : SL300, SPELLMAN -PBN POWER SUPPLY-BODY : DCS60-18E, SORENSON -PBN POWER SUPPLY-DISCHARGE : DCS600-1.75E, SORENSON -PRESSURE GUAGE : CT27A12TBC810 MKS, BAG100-SD, CONVECTRON TYPE-685 -ISOLATION VALVE : 14048-PE44-AAL1/0014, VAT -GAS BOX GAS-1 : Ar, 50SCCM GAS-2 : O2, 50SCCM GAS-3 : MFC NONE GAS-4 : MFC NONE DRY PUMP : none CHILLER : HX-150, NESLAB PCW FLOW PANEL : NOT OEM, PCW DISRIBUTION & FLOW MONITORINGOEM Model Description
None ProvidedDocuments
VEECO/MICROETCH
RF-350 S
Verified
CATEGORY
Ion Milling
Last Verified: Over 30 days ago
Key Item Details
Condition:
Used
Operational Status:
Deinstalled
Product ID:
105285
Wafer Sizes:
8"/200mm
Vintage:
1999
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
VEECO/MICROETCH
RF-350 S
CATEGORY
Ion Milling
Last Verified: Over 30 days ago
Key Item Details
Condition:
Used
Operational Status:
Deinstalled
Product ID:
105285
Wafer Sizes:
8"/200mm
Vintage:
1999
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available