Description
Optical Coating machineConfiguration
No ConfigurationOEM Model Description
The OPTORUN OTFC-1300 is a high-performance optical coating system that can accommodate chamber sizes ranging from φ 600mm to φ1800mm. It features a 60-point optical thickness monitor and an RF ion source that achieves uniform ion beam distribution over a larger area at high ion current density. The system is capable of depositing over 100 layers using 2 EB guns and a multi-point crucible hearth or annular hearth. It also includes an auto-deposition control system for fully automated processes and offers the option of selecting either a center-driving or planetary substrate dome. The system uses diffusion pumps in combination with Polycold or Cryo-pumps.Documents
No documents
OPTORUN
OTFC-1300
CATEGORY
Ion Beam / IBD
Last Verified: Over 60 days ago
Key Item Details
Condition:
Used
Operational Status:
Deinstalled
Product ID:
123138
Wafer Sizes:
Unknown
Vintage:
2016
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
Description
Optical Coating machineConfiguration
No ConfigurationOEM Model Description
The OPTORUN OTFC-1300 is a high-performance optical coating system that can accommodate chamber sizes ranging from φ 600mm to φ1800mm. It features a 60-point optical thickness monitor and an RF ion source that achieves uniform ion beam distribution over a larger area at high ion current density. The system is capable of depositing over 100 layers using 2 EB guns and a multi-point crucible hearth or annular hearth. It also includes an auto-deposition control system for fully automated processes and offers the option of selecting either a center-driving or planetary substrate dome. The system uses diffusion pumps in combination with Polycold or Cryo-pumps.Documents
No documents